High vacuum RTP rapid annealing furnace
This product is a high vacuum RTP rapid annealing furnace, heated by the halogen lamp, and can be used for rapid thermal annealing, rapid thermal oxidation, rapid thermal nitriding, silicidation, diffusion, compound semiconductor annealing, annealing after ion implantation, electrode alloying, crystallization and Densification, alloy melting point analysis, film deposition, etc
This product is a high vacuum RTP rapid annealing furnace, heated by the halogen lamp, and can be used for rapid thermal annealing, rapid thermal oxidation, rapid thermal nitriding, silicidation, diffusion, compound semiconductor annealing, annealing after ion implantation, electrode alloying, crystallization and Densification, alloy melting point analysis, film deposition, etc.
The equipment is mainly composed of quartz vacuum chamber, vacuum pump unit, water cooling unit and control system. The control system adopts intelligent temperature control meter control and touch screen operation. Its digital parameter interface and automatic operation mode provide users with an excellent research and development platform. The furnace chamber uses a left-right sliding way, and the distance from the sample is flexibly adjustable.
The equipment is equipped with a bipolar rotary vane pump, which has the advantages of small size, low noise, and no oil pollution.
high vacuum RTP rapid annealing furnace technical parameters:
Model | CY-O1000-200I-T-RTP |
Furnace tube specifications | Inner diameter 100mm, heating temperature zone 400mm, total length 550mm Material: high purity quartz |
Heating rate | 0-200℃/s |
Cooling rate | Above 200℃≤25min |
Heating element | Halogen lamp |
Vacuum interface | KF16 |
Intake port | Pagoda head, with 10mm outer diameter air hose |
Flange specification | φ100 stainless steel vacuum method water cooling flange Water cooling interface: φ10mm quick plug connector |
Vacuum system | Bipolar rotary vane pump, pumping speed 1.1L/s Ultimate vacuum: 10-1Pa |
Temperature control System | Intelligent temperature control meter temperature control With over-temperature protection Temperature measurement: K-type thermocouple |
Water chiller | Water tank capacity 9L, Max. lift head 10m |
Intake port | φ10 Pagoda Head |
Air release valve | Manual air release valve |
Power requirements | 220V 50Hz, 24kW |
Dimensions | 1200mm x 500mm x 480mm |
